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Categories:: Consumer R&D Software
Due to pollution of baking plates during wafer production, a periodic cleaning is necessary to guarantee the final quality of the outcoming product. Our customer is developing a new system to clean baking plates fully automatically with laser technology. We help to supervise the process with the use of image processing.
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Categories:: R&D Semiconductor Architecture Hardware Software
The microlens array used here is an array with an area of 2.8 mm² and 280 lenses. We designed the electrical hardware architecture, programed the software , and made the electrical installation to position and bond the microlens array with a multi-axis control unit and optical image processing in 6 degrees of freedom up to 100 nm.
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Categories:: Semiconductor R&D Architecture Hardware Software
Up to 15000 times per second a defined high voltage must be generated between two electrodes by resonant charging and discharged by trigger lasers. We have developed such a system from scratch and achieved unprecedented accuracy.
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Categories:: Semiconductor R&D Architecture Hardware Software

To operate an EUV LDP Source, a tin plasma must be generated and controlled in a high vacuum environment using high voltage. Together with our customer we have developed, built and programmed the entire environment of such an EUV source.
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