LIFETIME TESTBENCH FOR TIN HANDLING BOXES

The Tin Handling Box (THB) is a core module in a Tin based LDP-SOURCE (see for this also the other projects about EUV-LDP-SOURCES). Before such a complex module is used for the first time or after a refurbishment, it must be tested in all operating phases from heating-up over operation to cooling down again. We have completely designed such a testbench and have already delivered it several times.

Quality or better availability plays an extremely important role in the semiconductor business. Unscheduled downtime costs enormous sums of money. Test benches are therefore essential.

This testbench runs unaccompanied through all operating phases and records all relevant datas in a log file for a complete quality control.

#EUV

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