Architecture

Concept development
We help to select a final concept and give an initial estimate of the effort, the scope of the technical equipment and the initial costs.

System & Control architecture
In preparation for hardware and software engineering, we prepare detailed designs as well as detailed descriptions of all components and necessary activities for the implementation

VPD and OVPD (Organic - Vapor Phase Deposition) are technologies to produce organic electronics like OLEDs by deposit of special semiconductor materials. The Organic Electronic Cluster (OEC) is based on this technologies and offers a wide range of process modules needed in the field. We have taken over the vacuum concept and supported the customer by programming and commissioning of a demo cluster in the course of a temporary employment agency.

MLAP 06The microlens array used here is an array with an area of 2.8 mm² and 280 lenses. We designed the electrical hardware architecture, programed the software , and made the electrical installation to position and bond the microlens array with a multi-axis control unit and optical image processing in 6 degrees of freedom up to 100 nm.

ResonantChargingUp to 15000 times per second a defined high voltage must be generated between two electrodes by resonant charging and discharged by trigger lasers. We have developed such a system from scratch and achieved unprecedented accuracy.

To operate an EUV-LDP-Source, media and processes must be regulated and controlled in real time. In order to evaluate the hardware and software used for this purpose, a simulator is not only helpful but also saves enormous costs since the real machine is not occupied. For our customer we have developed such a simulator.

The Tin Handling Box (THB) is a core module in a Tin based LDP-SOURCE (see for this also the other projects about EUV-LDP-SOURCES). Before such a complex module is used for the first time or after a refurbishment, it must be tested in all operating phases from heating-up over operation to cooling down again. We have completely designed such a testbench and have already delivered it several times.

EBL2LayoutFrameTo operate an EUV LDP Source, a tin plasma must be generated and controlled in a high vacuum environment using high voltage. Together with our customer we have developed, built and programmed the entire environment of such an EUV source.

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